硅基光栅耦合器的研究进展  

The progress of silicon-based grating couplers

作　　者：杨彪[1] 李智勇[1] 肖希[1] Nemkova Anastasia 余金中[1] 俞育德[1] 

机构地区：[1]中国科学院半导体研究所,集成光电子学国家重点实验室,北京100083

出　　处：《物理学报》2013年第18期254-260,共7页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2011CB301701);中国科学院知识创新工程重要方向项目(批准号:KGCX2-EW-102);国家自然科学基金(批准号:61107048;61275065)资助的课题~~

摘　　要：硅基光子集成芯片的研究近年来发展迅速,已成为信息技术领域中最热门的研究方向之一,光通信、光互连、光传感等相关研发应用机构高度关注其发展,并积极介入.硅基光子集成芯片中,光栅耦合器作为光信号的输入和输出装置受到极大重视,尤其在封装和测试等环节体现出极具价值的技术优势.本文主要分析了光栅耦合器的工作原理、基本特性及国内外的发展现状和趋势,同时也概括了本课题组近期在该方向上的研究成果.Silicon-based photonic integrated chips recently have attracted great attention and actively intervened in many applications such as optical communications, optical interconnects, and optical sensing for relevant research institutions. Photonic integrated circuits are the key block to build information infrastructures. Among of them, grating couplers play an important role in silicon photonics, due to high efficient optical coupling on/off photonic chips. Also, they have many advantages in high density photonic packaging and on-wafer testing, such as large alignment tolerances and no requirements for wafer scribing or chip polishing. This review focuses on the principles and performances of grating couplers on silicon-on-insulator substrates. In this article, we also discuss the state-of-art and the trends in the near future, with a summary of our achievements over the last few years.

关 键 词：光栅耦合器 耦合效率 绝缘体上硅 光子集成 

分 类 号：TN256[电子电信—物理电子学]