时分反馈闭环MEMS电容式加速度计的新型自检测结构(英文)  

A Novel Self-Test Structure for Time-Divided Closed-Loop MEMS Capacitive Accelerometer

作　　者：黄靖清[1] 张婷婷[1] 赵猛[1] 伍峰[1] 陈中建[1] 洪理琛[1] 张雅聪[1] 鲁文高[1] 郝一龙[1] 

机构地区：[1]北京大学微电子学系微米/纳米加工技术国家级重点实验室,北京100871

出　　处：《纳米技术与精密工程》2013年第5期418-423,共6页Nanotechnology and Precision Engineering

基　　金：supported by the National High-Tech Research and Development Program of China (Grant No. 2008AA042201)~~

摘　　要：设计了一种针对闭环加速度计的新型自检测结构.详细描述了这种基于电荷注入的自检测功能的原理.针对时分反馈闭环加速度计,从理论上推导了加速度计输出与自检测电压之间的关系,并利用Matlab/Simulink模型进行了验证.基于0.35μm高压CMOS工艺,设计了整个读出电路.测试结果显示,在自检测模式下,输出对自检测电压的灵敏度是0.3 V/V.This paper presents a novel self-test structure for closed-loop capacitive accelerometer. The mechanism of the self-test function based on charge injection is explained. For a time-divided closed-loop accelerometer, the theoretical relationship between its voltage output and the self-test voltage is deduced and then verified by Matlab/Simulink model. The readout circuit was fabricated using 0.35 μm HV CMOS process. Test results show a sensitivity of about 0.3 V/V in the self-test mode.

关 键 词：加速度计 自检测 闭环 微机电系统 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置] TP274[自动化与计算机技术—控制科学与工程]