TC4钛合金表面磁控溅射TiAlN涂层的组织与性能  

Microstructure and Properties of TiAlN Coating Prepared by Magnetron Sputtering on Titanium Alloy

作　　者：潘晓龙[1] 刘啸锋[1] 王少鹏[1] 

机构地区：[1]西北有色金属研究院,陕西西安710016

出　　处：《钛工业进展》2013年第5期31-34,共4页Titanium Industry Progress

摘　　要：采用TiAl合金靶材,在TC4钛合金基材表面以不同磁控溅射工艺沉积制备了TiAlN涂层。利用扫描电子显微镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)分别分析了不同工艺制备的TiAlN涂层的表面形貌、表面成分及相结构,并对TiAlN涂层的耐蚀性、耐磨性等进行了研究。结果表明,采用磁控溅射工艺可在TC4钛合金表面制备出表面相对平整且结构致密的TiAlN涂层;沉积了TiAlN涂层的TC4钛合金试样的表面性能得到了提高,其磨损失重量和TC4钛合金基材相比降低了80%,耐盐雾腐蚀性能达到了保护级9级。TiAlN coating was deposited on TC4 titanium alloy by magnetron sputtering technique, using TiAl alloy target. Scanning electron microscope （SEM） and energy dispersing spectrum （EDS） and X-ray diffraction （XRD） were employed to analyze the surface morphology, compositions and phase structure of TiAlN coating samples. Corrosion resisting property and wear-resisting property of TiAlN coating samples were analyzed, too. The results show that the TiAlN coating has smooth surface and compact structure. The corrosion resisting property and wear-resisting property of TC4 are considerably improved by TiAlN coating. The wear weightlessness was reduced by 80% , salt fog corrosion resistance levels to protection grade 9.

关 键 词：TC4钛合金 TIALN涂层 磁控溅射 耐蚀性 耐磨性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]