射频磁控溅射制备铝酸锶长余辉发光薄膜  

Long-persistent luminescence of strontium aluminate thin films fabricated by radio frequency magnetron sputtering

作　　者：谢伟[1] 梁枫[1] 邹长伟[1] 唐美蝶[1] 邵乐喜[1] 

机构地区：[1]湛江师范学院物理科学与技术学院,广东湛江524048

出　　处：《材料研究与应用》2013年第3期188-192,共5页Materials Research and Application

基　　金：湛江师范学院青年项目(QL1020);广东省大学生创新创业训练计划(1057912014)

摘　　要：采用射频磁控溅射法在Si(100)衬底上制备稀土掺杂铝酸锶薄膜,在900℃和1100℃下、弱还原气氛中退火,分别得到SrAl2O4∶Eu2+,Dy3+和Sr4Al14O25∶Eu2+,Dy3+长余辉发光薄膜.结果表明:SrAl2O4结构是形成Sr4Al14O25相结构的中间相;在360nm激发光激发下,SrAl2O4∶Eu2+,Dy3+薄膜发光峰位于517nm处左右,发光强度相对略高于Sr4Al14O25∶Eu2+,Dy3+薄膜,且后者发光峰位于490nm处左右;Sr4Al14O25∶Eu2+,Dy3+薄膜的余辉性能优于SrAl2O4∶Eu2+,Dy3+薄膜.Rare earth ions doped long persistent films were grown on （100）-oriented Si substrates by the radio frequency magnetron sputtering. SrAl2O4 · Eu2＋ , Dy3＋ and Sr4Al14 O25： Eu2＋ , Dy3＋ long persistent films were obtained by annealing the films in weak reducing atmosphere under 900 ℃ and 1100 ℃, respec- tively. The results show that SrA1204 was considered as the intermediate phase during the growth process of Sr4 Al14O25 phase; Under 360nm excited, SrAl2 O4：Eu2＋ , Dy3＋ film exhibited a broad yellow-green emis- sion band peaking at 517nm while Sr4 Al14 O25： Eu2＋ , Dy3＋ film showed blue-green emission band peaking at 490nm, and the intensity of former one is higher than the latter one. The Sr4Al14O25：Eu2＋ , Dy3＋ film showed better afterglow characteristics than the SrAl2O4 ：Eu2＋ , Dy3＋ film.

关 键 词：磁控溅射 铝酸锶 长余辉 薄膜 

分 类 号：O482.3[理学—固体物理]