飞秒四光束干涉技术加工石墨烯纳米网  

Fabrication of Graphene Nanomeshes by the Femtosecond Four-Beam Interference Technique

作　　者：李艳[1] 陈辉[1] 代克杰[1] 

机构地区：[1]平顶山学院电气信息工程学院高压智能开关工程技术研究中心,河南平顶山467000

出　　处：《微纳电子技术》2013年第10期662-666,共5页Micronanoelectronic Technology

基　　金：河南省高校科技创新人才支持计划资助项目(2012HASTIT034);河南省基础与前沿技术研究计划资助项目(132300410303);平高电气博士后基金资助项目(PJH/JK17-2011)

摘　　要：由于石墨烯的特殊半导体性质,实现其在电子器件中实际应用的关键是对石墨烯层进行微纳结构处理。简单介绍了飞秒四光束干涉技术应用于石墨烯微纳加工的优势。对实现飞秒四光束干涉的两种实验方法进行了介绍并比较。然后选用改进的衍射分束方法对石墨烯进行加工,得到规则的二维纳米网结构,网线的最小宽度可达600 nm左右。与Matlab理论模拟的四光束干涉花样进行比较,通过调整干涉光束的能量,使得加工的结构更加规则,和理论花样十分吻合。该方法将对石墨烯微纳结构处理及其在集成微电子器件中的应用带来新的思路。Due to the unique semiconductor property of the graphene, the micro-nano structure processing of the graphene layer is the key to achieve the practical application of the graphene in electronic devices. The advantages of the femtosecond four-beam interference technique applied to the graphene micro-nano processing were simply introduced. Two experimental methods to realize the femtosecond four-beam interference were introduced and compared. Then through the improved diffractive beam splitter method, theregular two-dimensional graphene nanomeshes with the minimum mesh width about 600 nm were obtained. Comparing with the theoretical four beam interference pattern simulated by Matlab, the fabricated structures are more regular and very consistent with the theoretical patterns by adjusting the interference beam energy. The method will bring new ideas for the graphene micro-nano structure processing and the graphene application in the integrated microelectronic devices.

关 键 词：石墨烯 纳米网 飞秒激光 四光束干涉 微纳加工 

分 类 号：TB383[一般工业技术—材料科学与工程] TN305.2[电子电信—物理电子学]