气体压强及表面等离激元影响表面波等离子体电离发展过程的粒子模拟  

PIC/MCC simulation of the ionization process of SWP influenced by gas pressure and SPP

作　　者：陈兆权[1] 夏广庆[2] 刘明海[3] 郑晓亮[1] 胡业林[1] 李平[1] 徐公林[1] 洪伶俐[1] 沈昊宇[1] 胡希伟[3] 

机构地区：[1]安徽理工大学,电气与信息工程学院,电磁新装置研究室,淮南232001 [2]大连理工大学,工业装备结构分析国家重点实验室,大连116024 [3]华中科技大学,强电磁工程与新技术国家重点实验室,武汉430074

出　　处：《物理学报》2013年第19期341-351,共11页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:11105002);工业装备结构分析国家重点实验室开放基金(批准号:GZ1215);安徽高校省级自然科学研究项目(批准号:KJ2013A106);国家大学生创新训练计划项目(批准号:201210361058);安徽理工大学博士科研启动基金资助的课题~~

摘　　要：基于表面等离激元(SPP)的表面波等离子体(SWP)源,具有高密度、低温度及高产率等优异性能,其应用在电子器件微纳加工、材料改性等领域.但由于SPP激励SWP放电的电离过程难于用理论分析和实验测量描述,因而SWP源均匀稳定产生的电离发展过程一直未研究清晰.本文以SWP放电的数值模拟为研究手段,采用等离子体与电磁波相互作用的粒子模拟(PIC)方法,结合蒙特卡罗碰撞(MCC)方法处理碰撞效应的优势,研究气体压强影响电离过程的电磁能量耦合机理.模拟结果表明SWP的高效产生是SPP的局域增强电场致使,气体压强能够改变波模共振转换的出现时刻而影响了SWP的电离发展过程.本文的研究成果展示了SPP维持SWP放电的电离过程,可为下一代米级SWP源的参数优化提供设计建议.A surface-wave plasma （SWP） source based on surface plasmon polariton （SPP） has fine performances such as high density, low temperature, high production, and so on. It is applied in electronic device micro or nano processing, material modification, etc. Because the ionization of SWP heated by SPP is difficult to describe by theoretical analysis and experimental measurement, the ionization process of producing uniform stable SWP source is not yet well understood. The method in this paper is a numerical simulation of SWP discharges. The electromagnetic energy coupling mechanism of ionization process, influenced by gas pressure, which is studied by combining particle-in-cell （PIC） simulation of reciprocity between plasma and electromagnetic wave with Monte Carlo Collide （MCC） method in merit of dealing with particle collision. Simulated results suggest that the efficient production of SWP is induced by locally enhanced electric field of SPP, and the gas pressure influences the ionization process of SWP by altering the appearance time of wave-mode resonant conversion. Results of this paper show the ionization process of SWP discharge maintained by SPP, and further provide some advices for designing the parameter optimization of next generation meter-scale SWP source.

关 键 词：表面波等离子体 表面等离激元 粒子模拟 电离过程 

分 类 号：TN25[电子电信—物理电子学] O53[理学—等离子体物理]