集成电路装备集成化研发平台  

Integrated development platform of integrated circuit equipment

作　　者：武园浩[1] 田凌[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《计算机集成制造系统》2013年第9期2123-2130,共8页Computer Integrated Manufacturing Systems

基　　金：国家自然科学基金资助项目(51175287);国家科技部重大专项资助项目(2011ZX02403)~~

摘　　要：针对集成电路装备研发中的数据集成、应用集成与知识集成问题,设计了集成电路装备集成化研发平台。该平台遵循一切皆为服务的设计原则,使用服务构建应用系统,对产品数据的访问也被封装为统一的数据访问服务供外界调用。给出了集成电路装备集成化产品组件数据视图,并融合数据空间技术完成了异构数据的形式化数据资源建模。给出了基于本体的知识项统一描述方式,在此基础上实现了基于知识推送的知识应用模式。介绍了自主开发的集成电路装备集成化研发平台,并结合PECVD设备中喷淋头的设计,验证了平台的有效性。To solve the problems of data integration,application integration and knowledge integration in the research process of Integrated Circuit （IC） equipment,an integrated research and development platform was proposed.Based on the principle of Everything Is Service （EIS）,the application system was established and the access of product data was encapsulated as unified data for external calls.An integrated product component data view for IC equipment was presented.With the technology of data space,formal data resource modeling of heterogeneous data was realized.The method to describe heterogeneous knowledge was put forward,and knowledge application mode based on knowledge push was also implemented.The self-developed integrated platform oriented to research and development of IC equipment was introduced and its effectiveness was verified by example of the showerhead design in PECVD equipment.

关 键 词：集成电路装备 集成平台 服务 数据空间 知识描述 

分 类 号：TP391.7[自动化与计算机技术—计算机应用技术] TP29[自动化与计算机技术—计算机科学与技术]