椭偏法测量薄膜参数的实验改进  

EXPERIMENTAL IMPROVEMENT OF MEASURING THIN FILM PARAMETERS BY ELLIPSOMETRY METHOD

作　　者：姚志[1] 丁洪斌[1] 杨华[1] 

机构地区：[1]大连理工大学物理与光电工程学院,辽宁大连116024

出　　处：《物理与工程》2013年第5期42-44,50,共4页Physics and Engineering

摘　　要：介绍了椭偏仪实验装置及实验调整的不足对薄膜参数测量的影响,制作了小孔光阑和可调位移平台,对光接收和实验调整做了改进,给出了改进的实验调整和实验测量方法,改进后的实验调整简单易调,测量精度得到提高.The influence of the ellipsometer and the shortage of adjustment on the measure-ment of the thin film parameters has been discussed. A small aperture and an adjustable object stage have been designed. The optical receiver and experimental adjustment have been im-proved. With all these modifications, a much more accurate adjusting and measuring method with relatively easy operation procedures has been proposed.

关 键 词：椭偏仪 载物台 等幅椭圆偏振光 光接收器 

分 类 号：O484-4[理学—固体物理] G642[理学—物理]