基于激光干涉仪与自准直仪的平面镜轮廓高精度测量技术  

A High-precision Measurement Technique of Flat Mirror Profile Comprising Interferometers and Autocollimator

作　　者：杨平[1] 朱睿[1] 郭隐彪[1] 高增潔[2] 

机构地区：[1]厦门大学物理与机电工程学院,厦门361005 [2]东京大学精密工学系,日本东京1138656

出　　处：《机械工程学报》2013年第17期52-58,共7页Journal of Mechanical Engineering

基　　金：国家自然科学基金(51075343);国家知识产权局专利战略推进工程(ps2012-015)资助项目

摘　　要：基于三组激光干涉光路与一台自准直仪的光学扫描检测方法,开发可用于大尺寸平面镜二维轮廓的高精度测量技术。通过联立线性方程式与最小二乘法结合的计算算法,可得到平面镜二维轮廓的测量结果及整个测量过程的不确定度值。利用建模仿真整个测量过程,分析不同采样点数N下不确定度数值的变化趋势。此外,搭建基于高精度三坐标测量仪平台上的光学检测系统,试验果表明该技术成功实现对100 mm平面镜二维轮廓的测量,并可实现重复性测量精度在±20 nm范围内。通过与Zygo白光干涉系统结果的比较,该检测技术可以实现纳米级别的测量精度。An optical scanning technique comprising three laser interferometers and one autocollimator to measure a large flat mirror profile with high accuracy is described.The flat mirror profile and its measurement uncertainty are reconstructed by an application of simultaneous linear equations and least-squares method.The whole measurement process is numerically modeled by the computer simulation.Measurement uncertainties of the flat bar mirror profile are evaluated for different sampling numbers of the flat bar mirror.Moreover,a prototype of optical measurement system based on micro coordinate measuring machine platform is built.The experiment shows that the measurement technique successfully achieves the profile measurement of 100 mm flat mirror and repeatability of measurement accuracy within the range of ±20 nm.Comparing with the results measured by Zygo whitelight interferometer,this technique can achieve profile measurement in nanometer accuracy.

关 键 词：激光干涉仪 自准直仪 大平面镜二维轮廓 扫描检测 

分 类 号：TH741[机械工程—光学工程]