简化光路的激光干涉仪及其应用  

The Simplified Light Route Laser Interferometer and its Application

作　　者：隋新[1] 解中宁[1] 

机构地区：[1]辽宁工程技术大学,辽宁省阜新市123100

出　　处：《仪表技术与传感器》2000年第11期15-17,共3页Instrument Technique and Sensor

摘　　要：文中论述了简化光路激光干涉仪的原理 。This paper discusses the principle of the simplified light route laser interferometer from its optical and electrical components, and makes a detailed description of the measuring precision of this instrument and its application in mechanical engineering.

关 键 词：激光干涉仪 简化光路 测试精度 工作原理 

分 类 号：TH744.3[机械工程—光学工程]