调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响  

Influence of Modulation Periodicities on Structure and Corrosion Properties of CrAl/CrAlN Multi-layer Films

作　　者：吕艳红[1,2] 吉利[1] 刘流[3] 李红轩[1] 刘晓红[1] 陈建敏[1] 周惠娣[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州730000 [2]中国科学院大学,北京100049 [3]天水师范学院生命科学与化学学院,甘肃天水741001

出　　处：《中国表面工程》2013年第5期18-23,共6页China Surface Engineering

基　　金：国家自然科学基金(50705093);创新群体基金(50421502);国家重点基础研究发展计划(973计划)(2007CB607601)

摘　　要：采用中频非平衡磁控溅射技术制备CrAl/CrAlN多层薄膜,研究了调制周期对CrAl/CrAlN多层薄膜的微观结构、机械性能和耐腐蚀性能的影响。研究表明:CrAl/CrAlN多层薄膜具有致密的层状结构。随着调制周期的增大,薄膜应力由拉应力转变为压应力,当调制周期为285.7nm时,CrAl/CrAlN多层薄膜的硬度出现了极大值。此外,调制周期对薄膜的耐腐蚀性能有显著的影响。经过96h盐雾(3.5%NaCl)试验,调制周期为142.8nm的CrAl/CrAlN多层薄膜依然没有发生腐蚀现象,表明此条件下CrAl/CrAlN薄膜具有优异的耐腐蚀性能。CrAI/CrAIN multi-layer films were deposited by mid-frequency unbalanced magnetron sputtering. The structure, mechanical features and corrosion resistance as a function of modulation periodicity of the films were also studied. The results show that all of the CrA1/CrAIN multi-layer films have denser layered struc ture. The internal stress of the CrAI/CrAIN multi-layer films becomes the compressive stress as the modula tion periodicity increases, and the hardness of the films attains a maximum value when the modulation periodic ity is 285. 7 nm. Moreover, the modulation periodicity has a great effect on the corrosion resistance of the CrA1/CrA1N multi-layer films. After 96 h salt spray corrosion test （3.5% NaC1）, the CrAI/CrAIN multi layer films at the modulation periodicity of 142.8 nm are not corrosive at all, which show that the films have excellent corrosion resistance.

关 键 词：磁控溅射 CrAI CrAIN 多层薄膜 微观结构 耐腐蚀性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理] TG174.21[金属学及工艺—金属学]