钛掺杂无氢类金刚石薄膜疏水性能研究  

Hydrophobic Property of Hydrogen-Free Ti-DLC Films

作　　者：张林[1,2] 林国强[1] 马国佳[1,2] 魏科科[1] 段仲伟 

机构地区：[1]大连理工大学三束材料改性教育部重点实验室,辽宁大连116024 [2]北京航空制造工程研究所高能束流加工技术重点实验室,北京100024

出　　处：《稀有金属材料与工程》2013年第10期2123-2126,共4页Rare Metal Materials and Engineering

摘　　要：采用MEVVA离子源复合磁控溅射沉积系统,在钛合金Ti6Al4V基体上制备Ti掺杂DLC薄膜,研究Ti掺杂对DLC薄膜疏水性能的影响。通过X射线能谱仪(EDS)、X射线光电子谱(XPS)、原子力显微镜(AFM)分别对薄膜的组分、化学键以及表面形貌进行分析;通过测量静态接触角分析薄膜的润湿性并计算薄膜的表面能。结果表明:Ti掺杂DLC膜明显提高疏水性能,水接触角最高达到105°。薄膜中sp2C杂化键组分增加以及表面形成Ti-O键,是导致薄膜表面能降低的重要因素。Ti-containing diamond-like carbon （Ti-DLC） films were deposited on Ti6A14V substrate by a hybrid deposition system of MEVVA ion source and magnetron sputtering.The influence of Ti contents on the hydrophobic property of DLC films was investigated.The composition,bonding structure and surface morphology of the films were characterized by EDS,XPS and AFM,respectively.The wettability of the films was examined by the contact angle measurement.The surface energy including the dispersive and polar components was evaluated using two types of liquid with different polarity.The results show that the hydrophobicity of Ti-doped DLC films is obviously improved,whose water-contact angle increases to 105° from 68.5°.The main reason for the hydrophobicity improving may be that the surface energy of the Ti-doped DLC film is decreased by higher sp2-bonded carbon configuration and the formation of Ti-O bond.

关 键 词：类金刚石膜 掺杂 接触角 表面能 

分 类 号：TB43[一般工业技术]