MEMS无线无源电容压力传感器结构设计及制备  

Design and Preparation of the MEMS Wireless Passive Capacitive Pressure Sensor

作　　者：李颖[1,2] 梁庭[1,2] 林斯佳[1,2] 喻兰芳[1,2] 崔海波[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术国防科技重点实验室,太原030051

出　　处：《半导体技术》2013年第11期827-830,共4页Semiconductor Technology

基　　金：国家自然科学基金(51075375)

摘　　要：摘要：设计了一种无线无源电容压力传感器。传感器采用MEMS工艺由硅-玻璃浆料-硅键合而成，独特的三层结构设计用以实现高温环境下的测量。应用有限元分析软件对传感器结构进行了仿真分析，并详细介绍了其加工工艺；引进了一种新型的非接触无源测量技术，用于检测传感器压敏电容极板间距的变化。测试结果表明，传感器可以实现外界压力信号与谐振频率信号之间的转化，传感器在0～200kPa压力下，谐振频率随压力变化近似成线性关系且谐振频率随压力的增大逐渐减小，灵敏度约为10．6kHz／kPa。A wireless passive capacitive pressure sensor was designed and fabricated. This sensor was proposed to operate under high temperature due to its unique silicon-glass paste-silicon sandwiched structure. The structural parameters was determinated by finite element analysis, as well as the detailed process flow was introduced. Furthermore, a non-contact passive measurement technology was presented to detect the change of the embed capacitance of the sensor in a distance. The test results show that the relation between an applied pressure signal and the shift of the resonance frequency is successfully located, the resonance frequency drops linearly as the applied pressure rises from 0 to 200 kPa with a sensitivity of 10.6 kHz/kPa approximately.

关 键 词：无线无源传感器 压力传感器 MEMS 非接触测量 谐振频率 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]