石英陶瓷激光刻蚀加工技术研究  

Research on Etching of Quartz Ceramic by Laser Beam

作　　者：孔令瑞[1] 张菲[1] 段军[1] 曾晓雁[1] 

机构地区：[1]华中科技大学武汉光电国家实验室,湖北武汉430074

出　　处：《激光与光电子学进展》2013年第11期130-135,共6页Laser & Optoelectronics Progress

基　　金：国家自然科学基金重点项目(51135005)

摘　　要：尝试了利用激光进行石英陶瓷刻蚀加工的方法,采用紫外激光器和光纤激光器进行了刻蚀加工实验。加工样品的测试由台阶测试仪以及扫描电镜(SEM)完成,主要观测加工样品的刻蚀深度、刻蚀底面的微观形貌等。实验结果表明,利用激光对石英陶瓷进行刻蚀加工,相对于砂纸或金刚石刻蚀其优点在于激光可以刻蚀出设定的准三维立体结构,刻蚀尺寸、深度可以精确控制。刻蚀量与激光的能量密度、扫描速度等有密切关系。光化学作用与光热作用原理的不同是造成紫外激光和光纤激光的刻蚀结果不同的主要因素。Attempts are made to research the laser etching of quartz ceramic. Ultraviolet （UV） laser and fiber laser are used in the etching of quartz ceramic. Step tester and scanning electron microscope （SEM） are used to test the samples processed by lasers. The information of depth, accuracy and microstructure is obtained through the test. The result shows that quartz ceramic can be processed by UV laser and fiber laser. Compared with traditional means, using laser etching, quasi-three-dimensional structures can be achieved and the etching depth and area can be controlled with higher accuracy. The etching quality and quantity have a close relationship with the laser pulse, scanning speed and other parameters. The difference between photochemical and photothermal effect is the main factor leading to the different results of UV laser and fiber laser.

关 键 词：激光技术 激光微加工 石英陶瓷 刻蚀 表面质量 

分 类 号：TN249[电子电信—物理电子学]