无阀微泵多物理场耦合分析及实验研究  

MULTI-PHYSICS COUPLING ANALYSIS AND EXPERIMENT OF THE VALVE-LESS MICROPUMP

作　　者：关炎芳[1] 韩莉莉[1] 刘春波[1] 俞正寅[2] 

机构地区：[1]河南工业大学机电工程学院,郑州450007 [2]中科院上海微系统与信息技术研究所,上海200050

出　　处：《工程力学》2013年第11期233-238,259,共7页Engineering Mechanics

基　　金：国家自然科学基金青年基金项目(11002050);河南省教育厅科学技术研究重点项目(13A460159)

摘　　要：为了模拟微泵实际工作过程,需要找出微泵运动的控制方程。该文从压电振子作用力F及液体反作用力P入手,给出微泵压电-应力-流体多物理场耦合的控制方程组,根据控制方程模拟微泵实际工作过程。通过对压电振子耦合前后变形量进行对比发现,由于液体的反作用力阻碍压电振子运动,耦合后z方向位移比耦合前小;且频率越大,压电振子位移越大,其临界值为1000Hz;大于1000Hz压电振子位移将出现畸变,微泵运行不稳定,频率越大畸变越严重。微泵进出口处瞬时流量均随频率和电压的增加而增大,而锯齿型流道微泵瞬时流量大于同等条件下的锥型流道微泵。该文最后采用微系统加工方法及聚二甲基硅氧烷(PDMS)不可逆封装技术制作出两种微泵结构,并对两种微泵进行性能测试,结果证明微泵的最佳工作频率为100Hz^800Hz,在此频率范围内压力和流量均处于最大值,与数值分析结果相吻合。为了验证微泵自吸能力,对锯齿型流道微泵进出口存在压差情况进行测试,得出微泵流量最大为40μl/min,最大压力头为1.25kPa。For simulating the factual working process. The PZT-Membrane-Fluid multi-physics coupling governing equations of the micropump have been established, based on the piezoelectric transducer force F and the liquid counterforce P. Thusly, the actual working process can be simulated with the governing equations. The z direction displacement of the piezoelectric transducer after coupling is less than before coupling because the counterforce of the liquid blocked the piezoelectric transducer movement. The displacement is larger along with the frequency enhanced, and the critical value is 1000Hz. When the frequency greater than 1000Hz, the displacement will produce aberrance, and the aberration becomes severity along with the frequency enhanced. The instantaneous flow rates will increase along with the voltage and frequency enhanced. However, the instantaneous flow rates of the saw-tooth micropump are larger than that of traditional micropump. Two micropumps have been fabricated with microsystem technology and encapsulated irreversibly by the ultraviolet radiation. The performance test of the micropump has been carried out. The result shows that the optimal working frequency isexperiment in the existence of a pressure difference

关 键 词：微泵 多场耦合 数值分析 变形量 性能 

分 类 号：TH302[机械工程—机械制造及自动化]