近化学计量比Ti:PPLN平面光波导  

Near-Stoichiometric Ti:PPLN planar waveguide

作　　者：张帅[1] 顾超[1] 牛德森[1] 肖克楠 张远航[1] 华平壤[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《光通信技术》2013年第11期60-62,共3页Optical Communication Technology

摘　　要：使用钛扩散的方法在Z切铌酸锂(LiNbO3)基片上制备平面光波导,并进行富锂气相输运平衡(VTE)处理,获得平面光波导。利用外加电场法对其周期极化,制备出近化学计量比钛扩散周期极化铌酸锂(Ti:PPLN)平面光波导。对近化学计量比Ti:PPLN平面光波导的制备方法及工艺进行深入研究,为制备近化学计量比Ti:PPLN条波导奠定基础。A planar waveguide was fabricated on a z-cut LiNbO3 substrate by Ti-diffusion method. After the Li-rich vapor transport equilibration （VTE） treatment, the near-stoichiometric Ti：LiNbO3 planar waveguide was fabricated. A near-stoichiometric Ti-diffused periodically poled LiNbO3 （Ti：PPLN） planar waveguide was produced by an external electric field. This method was feasible to make near-stoichiometric Ti：PPLN planar waveguide. The fabrication process and method could be further explored for the development of near-stoi chiometric Ti：PPLN strip waveguide.

关 键 词：钛扩散 气相输运平衡 铌酸锂 周期极化 光波导 

分 类 号：TN253[电子电信—物理电子学]