中间层类型对类金刚石涂层界面结合性能和抗磨损能力的影响  

Effects of different interlayers on the adhesion and wear resistance of diamond-like-carbon coatings

作　　者：纪锡旺 许振华[1] 何利民[1] 甄洪滨 李迪敏[2] 郝俊文[2] 

机构地区：[1]北京航空材料研究院,北京100095 [2]华东理工大学机械与动力工程学院,上海200237 [3]上海赛屋涂层技术有限公司,天津300308

出　　处：《真空》2013年第6期1-6,共6页Vacuum

摘　　要：采用等离子体增强化学气相沉积（既CVD）、磁控溅射和阴极电弧离子镀技术相结合的方法，合理利用金属Cr靶和TiAl靶，选择性地在硬质合金基体上沉积了具有不同中间层（Cr、TiAI、TiAlN、Cr／TiAI／TiAlN）的复合结构体系类金刚石（DLC）涂层。选用拉曼光谱、光学显微镜、扫描电子显微镜和能谱仪对涂层形貌和结构进行表征测试。同时，利用显微硬度计、洛氏硬度计、划痕测试仪和球磨仪系统地分析了涂层的力学性能。研究结果表明：基体／Cr/TiA1，TiAlN／DLC涂层体系综合性能最佳，具有较高硬度（～3251HV）的同时结合性能最优（结合力～56．2N），且抗磨损能力最强。Cr／TiAl／TiAlN较其它中间层可更有效地缓解涂层体系内应力并提高基体／涂层间的结合强度和抗磨损能力。基体／TiAlN／DLC涂层体系复合硬度最高（-3350Hv），但其韧性最差、结合力最低（-35N），在硬质合金基体上直接沉积TiAlN作为中间层不利于提高基体／涂层间的结合强度。Cr/DLC, TiA1/DLC, TiA1N/DLC and Cr/TiA1/TiA1N/DLC composite coatings were deposited on cemented carbides by combination of PECVD, magnetron sputtering and cathodic arc ion plating. Scanning electron microscopy, photoelectron spectroscopy, EDS, micro-hardness tester, Rockwell-C indenter, scratch tester, ball-on-disk wear tester were used to study the composition, morphology, micro-hardness, toughne,~s, interfaeial adhesion performance and wear resistance of the DLC coatings in detail. The results show that the highest adhesion （-56.2N）of the coatings among the four coating samples is gained by multi-layer DLC sample with the structure of Cr/TiA1/TiA1N/C, whose micro-hardness is -3251HV. Meanwhile, the toughness of DLC coating is also significantly imppoved with Cr/TiA1/TiA1N interlayers. Wear resistance of Cr/TiA1/TiA1N/DLC composite coatings is much higher than that of others when the wear cycle is exceed to 300. The toughness and adhesion of TiA1N/DLC sample shows the worst performance among lhose samples, even though its micro-hardness is the highest one.

关 键 词：类金刚石 中间层 抗磨损能力 结合强度 

分 类 号：TG17[金属学及工艺—金属表面处理]