氮对类金刚石薄膜的微观结构内应力与附着力的影响  

EFFECT OF NITROGEN ON THE RESIDUAL STRESS AND ADHESION OF DIAMOND-LIKE AMORPHOUS CARBON NITRIDE FILMS

作　　者：居建华[1,2] 夏义本[1,2] 张伟丽[1] 王林军[1] 史为民 黄志明[3] 李志锋[3] 郑国珍[3] 汤定元[3] 

机构地区：[1]上海大学材料科学与工程学院 [2]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 [3]中国科学院上海技术物理研究所红外物理国家重点实验室

出　　处：《物理学报》2000年第11期2310-2314,共5页Acta Physica Sinica

摘　　要：采用原子力显微镜 (AFM )、俄歇电子能谱 (AES)和显微压痕分析等手段对射频等离子体增强化学气相沉积法制备的掺氮类金刚石 (DLC :N)薄膜的微观结构和力学性能进行了研究 .结果表明 ,随着含氮量的增加 ,DLC薄膜的AFM表面形貌中出现了几十纳米的颗粒 ,原子侧向力显微镜和AES分析表明这种纳米颗粒是x大于 0 12 6的非晶氮化碳CNx 结构 .这种非晶DLC/CNx 的纳米复合结构 ,减小了薄膜的内应力 ,从而提高了薄膜与衬底的附着力 .Microstructure and adhesion properties of nitrogen-doped diamond\|like amorphous carbon (DLC) film deposited by r f plasma\|enhanced chemical vapor deposition method is studied by atomic force microscope, Auger electron spectroscopy (AES) and micro\|indentation analysis. Results show that, with the increase of nitrogen content, particles of tens of nanometer in size appear in the film. The atomic lateral force microscope and AES analyses show that these nano particles are nitrogen\|rich amorphous carbon nitride CN x , where x is larger than 0.126. Micro\|indentation measurement shows that this DLC/CN x nano\|composite structure reduces the residual stress of the film and improves the adhesion between DLC film and Si substrate.

关 键 词：类金刚石薄膜 微观结构 附着特性 氮 掺杂 

分 类 号：O484[理学—固体物理]