脉冲红外和热导检测法测定钌粉和钌靶中氧、氮含量  

Determination of Oxygen and Nitrogen Content in Ru Powder and Target by Pulsed Infrared and Thermal Conductivity Detection Method

作　　者：刘伟 刘文 韩守礼 贺小塘 谭志龙 方卫 王应进 杨晓滔 甘建壮 唐发静 

机构地区：[1]贵研资源(易门)有限公司,云南易门651100 [2]贵研铂业股份有限公司稀贵金属综合利用新技术国家重点实验室,昆明650106

出　　处：《贵金属》2013年第4期53-56,共4页Precious Metals

基　　金：国家高技术研究发展计划(863计划)项目(2012AA063203);国家自然科学基金(51262015);云南省自然科学重点基金(2010ZC261);云南省自然科学基金(2010ZC55)

摘　　要：建立了钌粉和钌靶中氧、氮含量的测定方法。研究了样品前处理、仪器条件、助熔剂选择、方法准确度和精密度等。以锡-碳作助熔剂,在选定条件下,采用脉冲红外和热导检测法,测定50×10-6氧时RSD<10%,测定40×10-6氮时RSD<25%;加标回收率:氧100%～102%,氮91%～101%。测定范围:氧0.002%～0.4%,氮0.0001%～0.02%。方法简便、快速、精密度和准确度满足质量控制要求。A method using the pulsed infrared-thermal conductivity detection has been established to determine O and N content in Ru powder and target. Pre-treatment of the samples, testing condition of the equipment, choice of the accelerators, accuracy and precision of the method were investigated. Under the optimized conditions with Sn-C as an accelerator, the RSD （Relative standard deviation, n=7） was found to be 〈10% for oxygen analysis when its content did not exceed 50×10^-6, and 〈25% for nitrogen analysis when its content was no more than 40 ×10^-6. The recovery for standard addition test was 100%-102% for oxygen and 91%-101% for nitrogen. The measuring ranges were 0.002%-0.4% for oxygen and 0.0001%-0.02% for nitrogen. The accuracy and precision of the method are satisfactory.

关 键 词：分析化学 钌粉 钌靶 氧 氮含量 

分 类 号：O659.32[理学—分析化学] O659.33[理学—化学]