点火黑腔用铝铜复合芯轴的制备及性能  

Fabrication and performance of Al/Cu hybrid mandrel for NIF ignition hohlraum

作　　者：赵利平[1] 邢丕峰[1] 杨蒙生[1] 郑凤成[1] 易泰民[1] 谢军[1] 袁光辉[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2013年第12期3255-3258,共4页High Power Laser and Particle Beams

摘　　要：选取纯度较高的1100铝棒作为加工模芯的原材料,利用金刚石车床精加工出表面粗糙度均方根值小于20nm的铝模芯,采用磁控溅射的方法在铝模芯上制备厚度大于5μm的铜防护层,得到铝铜复合芯轴。对制备的铜防护层的表面微观结构、结晶性能、厚度一致性进行了分析测试,结果表明磁控溅射法制备的铜防护层沿(111)面择优生长,表面粗糙度均方根值小于30nm,厚度一致性优于95%,圆柱度小于1μm。镀层与基底结合力强,可满足大厚度黑腔涂层的制备需求。By comparing the chemical component and machined performance of two kinds of 1100 A1 rod, the higher purity one is chosen for A1 mandrel. A1 mandrel is prepared by diamond turning machine with a surface roughness less than 20 nm （RMS） and AI/Cu hybrid mandrel is explored by depositing a 5 p^m thick copper layer on A1 mandrel via magnetron sputtering deposition. The surface roughness, thickness uniformity and crystallinity of Cu film are analyzed by white light interferometer, XRD. The results show that the prepared Cu film with surface roughness less than 30 nm （RMS）, thickness uniformity more than 95 ~, and cylindricity less than 1 gm appears （111） preferential orientation growth. The interfacial bonding strength be tween Cu film and substrate is strong enough for depositing 11 μm thick hohlraum wall containing depleted uranium （DU）.

关 键 词：惯性约束聚变 铝铜复合芯轴 磁控溅射 表面粗糙度 结晶性能 

分 类 号：TL632.1[核科学技术—核技术及应用]