激光清洗技术在雷达T/R组件制造中的运用  

Application of Laser Cleaning Technology in Manufacture of Radar T/R Module

作　　者：林伟成[1] 

机构地区：[1]中国电子科技集团公司第三十八研究所,安徽合肥230031

出　　处：《电子工艺技术》2013年第6期352-355,共4页Electronics Process Technology

基　　金：国防基础科研项目(项目编号:A1120110020)

摘　　要：要提高雷达T/R组件的可靠性,清洗工艺是非常重要的工艺步骤。但是,超声波清洗和汽相清洗等很多清洗工艺都有很多的缺点,使用的溶剂污染环境,破坏大气层,对人体有害,而且还会对组件中的电路或芯片造成损伤。激光清洗工艺有环保和无损伤的优点,而且能有效地清除组件中的氧化物、有机污染物和各种细小的颗粒等。可以预测,激光清洗必将在雷达T/R组件的制造中发挥越来越重要的作用。Cleaning process is a very important technology for improving the reliability of radar T/R module. But many cleaning technologies, such as ultrasonic clean, vapor phase clean, have many shortcomings. The solvents used in cleaning spoil the environment, damage the atmosphere, harm human body, and hurt the circuits and chips in the T/R module. Laser cleaning is environment-friendly, has not any damages, it can effectively remove the oxide layer, organic compounds and various tiny grains.It is predicted that laser cleaning will play an important role in the manufacture of radar T/R module.

关 键 词：T R组件 可靠性 清洗 激光清洗 

分 类 号：TN605[电子电信—电路与系统]