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机构地区:[1]东北大学机械工程与自动化学院,沈阳110004
出 处:《真空科学与技术学报》2013年第12期1199-1202,共4页Chinese Journal of Vacuum Science and Technology
摘 要:涡旋真空泵是一种无油容积式机械干式真空泵,具有结构简单,真空度高,振动噪声低,可靠性高等优点。但涡旋真空泵也有一些缺点,如抽速较低,初始抽气时泵的工作状态不稳定,加工制造困难等。本文提出了一种双面非对称涡旋真空泵的设计思路,给出了泵主要结构及抽气性能参数的设计计算。此设计提高了泵的抽速,解决了泵初始抽气时状态不稳定等问题,减小了对涡旋齿的强度要求,增大了涡旋盘抽气的有效利用面积。A novel type of the double-side asymmetric dry scroll vacuum pump was proposed to heighten its strengths, including the simple structure, high reliability, low pressure and low noises; and to improve its weaknesses, such as the low pumping speed, manufacturing difficulties, and instability in the initial pumping stage. The structures and pumping characteristics of the newly-developed double-side asymmetric dry scroll vacuum pump were physically modeled, empirically approximated, and analytically simulated. The preliminary results shou that the newly-designed, double-side asyrmnetric dry scroll pumps outperforms the conventional one in many ways. For example, a higher pumping-speed, a re- laxation of the strength requirement of the scroll wraps, and increased utilization efficiency of the scroll plates.
分 类 号:TB752.2[一般工业技术—真空技术]
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