自增强承压圆筒结构的超高压力传感器  

Ultra-high pressure sensor with autofrettaged cylinder structure

作　　者：郭鑫[1] 热合曼.艾比布力 王鸿雁 赵立波[1] 蒋庄德[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [2]新疆交通职业技术学院汽车与机电工程学院,新疆乌鲁木齐831401 [3]陕西省计量科学研究院,陕西西安710048

出　　处：《光学精密工程》2013年第12期3152-3159,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.50905139;No.90923001;No.51375378);中央高校基本科研业务费专项资金资助项目(No.2012jdgz08);陕西省科技计划资助项目(No.2012KJXX-01);国家科技重大专项资助项目(No.2011ZX04004-061);长江学者和创新团队发展计划资助项目(No.IRT1033);教育部科学研究重大项目(No.311001);高等学校学科创新引智计划资助项目(No.B12016);国家重大科学仪器设备开发专项(No.2012YQ03026101)

摘　　要：采用自增强技术与硅压阻效应研制了超高压力传感器,该传感器能够消除封装残余应力的影响并保证其在进行大量程压力测量时具有较高的灵敏度输出。该传感器的弹性元件为圆筒结构的高强度弹簧钢,敏感元件为平膜倒杯式硅压阻芯片。传感器工作时,超高压力作用在圆筒结构的金属弹性元件使其发生轴向位移,该位移量通过弹性元件顶端的传递杆施加到周边固支的硅压阻芯片上,使置于此处的4个电阻条阻值发生线性变化,从而输出与被测压力成正比的电压值。在研究弹性元件在1 000MPa超高压力下的工作性能时,理论与仿真相结合研究了弹性元件的承载强度,确定采用自增强处理技术提高弹性元件的承载能力。最后,对封装好的传感器静态性能进行了标定实验。实验结果表明,该传感器能够承受1 000MPa以上的工作压力,线性度为0.52%,满足工业领域的应用需求。An ultra-high pressure sensor based on autofrettage technology and piezoresistive effect is developed to remove the residual stress in packaging and to ensure a high sensitive output in pressure measurement with a large range.The elastic element is made of high strength spring steel with cylinder structure,and the sensitive element is silicon flat chip with an inverted cup structure.When the pressure is applied to the metal elastic element,the axial deformation of the metal elastic element is occurred and passed to the chip via a pass rod,then the chip＇s resistive signal is proportional to the axial deformation based on the piezoresistive effect.The pressure measurement is accomplished by measuring the resistive signal.In the study of working ability of the elastic element,the load bearing strength of the elastic element is researched by combining the theory and simulation,and the autofrettage technology is used to improve the loading ability of the elastic element.Finally,the static performance experiments in 250 MPa and 1 000 MPa ranges are carried out for a packaged sensor respectively.The experiments show that the comprehensive accuracy of the sensor is 2.3％,the linearity is 0.7％ in 250 MPa and 0.52％ in 1 000 MPa.The simulative and experimental results both indicate that the metal elastic element with autofrettaged cylinder structure is able to endure ultra-high pressure beyond 1 000 MPa,and the developed sensor can meet the measuring demand of the contemporary industry.

关 键 词：超高压力传感器 自增强技术 压阻效应 微机电系统 圆筒结构 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]