便携式硅谐振式压力传感器数据采集系统  

Portable Data Acquisition System for Silicon Resonant Pressure Sensor

作　　者：朱霄波[1] 苑伟政[1] 任森[1] 

机构地区：[1]西北工业大学,空天微纳系统教育部重点实验室,陕西西安710072

出　　处：《仪表技术与传感器》2013年第11期1-3,10,共4页Instrument Technique and Sensor

摘　　要：针对硅谐振式压力传感器的使用需要,设计了一种基于FPGA平台的便携式数据采集系统。在分析传感器工作原理的基础上,提出使用等精度测频法实现对传感器输出信号的高精度采集,并搭建了基于LabVIEW的自动测试平台。通过与标准频率计对硅谐振式压力传感器进行的对比测试表明,系统平均相对误差优于0.001%,能够满足使用需要,且大幅了减小系统体积,为智能化传感器和压力测量系统的搭建开发提供了平台。A FPGA-based portable data acquisition system was designed for the application of silicon resonant pressure sensor. After analyzing the principle of resonant pressure sensor, an equal precision frequency method was proposed to measure the output of the sensor and an automation test platform was established based on LabVIEW. Comparison experiment result with a standard fre- quency counter indicates that the average relative error is better than 0.001% which satisfied the demand. It drastically simplifies the system and provides a platform for future smart sensor and pressure measurement system development.

关 键 词：谐振式 压力传感器 数据采集 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]