逆向哈特曼面形测量法中最佳针孔直径确定  

The Best Diameter Determination of the Pin Aperture in Inverse Hartmann Surface Form Measurement System

作　　者：马建荣[1] 郝群[1] 朱秋东[1] 胡摇[1] 

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《计量学报》2014年第1期39-43,共5页Acta Metrologica Sinica

基　　金：国家自然科学基金（61078044）

摘　　要：在逆向哈特曼法中，针孔光阑具有选择光线和决定测量分辨率的作用，其直径大小直接影响CCD接收器上光斑的大小以及光线在瞳面上精确位置的确定。用衍射光学理论，推导出了精确计算针孔直径的傅里叶变换表达式，并进一步给出了针孔直径的快速解析计算式。实验证明，在实际非球面面形测量中，快速估算式能够满足计算最佳针孔直径的精度要求并提高计算效率。In the inverse Hartmann surface form measurement, the pin aperture selects light reflected from the test surface and determines the measurement resolution. The diameter of the pin aperture has influence on the size of light spots on CCD and the accuracy of determining the ray location on the pupil. The Fourier transform expression for precisely calculating the pin aperture diameter is derived from diffraction optics theory. Moreover, an estimation formula which directly calculates the diameter of the pin aperture is also derived. Simulation and experiment show that the fast estimation formula can meet the accuracy and effectively save time when calculate the best diameter of the pin aperture in real measurement.

关 键 词：计量学 逆向哈特曼 面形测量 非球面 最佳针孔 

分 类 号：TB96[机械工程—光学工程]