Realization of an Automated Microassembly Task Involving Micro Adhesive Bonding  

作　　者：Fu-Dong Li De Xu Zheng-TaoZhang Ya-Li Shi 

机构地区：[1]Research Center of Precision Sensing and Control,Institute of Automation,Chinese Academy of Sciences

出　　处：《International Journal of Automation and computing》2013年第6期545-551,共7页国际自动化与计算杂志（英文版）

基　　金：supported by National Natural Science Foundation of China under(Nos.61227804 and 61105036)

摘　　要：An automated approach is proposed for a microassembly task, which is to insert a 10 μm diameter glass tube into a 12 μm diameter hole in a silicon substrate, and bond them together with ultraviolet （UV） curable adhesive. Two three-degree-of-freedom micromanipulators axe used to move the glass tube and the dispensing needle, respectively. Visual feedback is provided by an optical microscope. The angle of the microscope axis is precisely calibrated using an autofocus strategy. Robust image segmentation method and feature extraction algorithm are developed to obtain the features of the hole, the glass tube and the dispensing needle. Visual servo control is employed to achieve accurate aligning for the tube and the hole. Automated adhesive dispensing is used to bond the glass tube and the silicon substrate together after the insertion. On-line monitoring ensures that the diameter of the adhesive spot is within a desired range. Experimental results demonstrate the effectiveness of the proposed strategy.An automated approach is proposed for a microassembly task, which is to insert a 10 μm diameter glass tube into a 12 μm diameter hole in a silicon substrate, and bond them together with ultraviolet （UV） curable adhesive. Two three-degree-of-freedom micromanipulators axe used to move the glass tube and the dispensing needle, respectively. Visual feedback is provided by an optical microscope. The angle of the microscope axis is precisely calibrated using an autofocus strategy. Robust image segmentation method and feature extraction algorithm are developed to obtain the features of the hole, the glass tube and the dispensing needle. Visual servo control is employed to achieve accurate aligning for the tube and the hole. Automated adhesive dispensing is used to bond the glass tube and the silicon substrate together after the insertion. On-line monitoring ensures that the diameter of the adhesive spot is within a desired range. Experimental results demonstrate the effectiveness of the proposed strategy.

关 键 词：Micro adhesive bonding MICROASSEMBLY visual servo control image segmentation feature extraction. 

分 类 号：TG95[金属学及工艺—钳工工艺]