载荷和对磨速率对CNx薄膜的摩擦学性能的影响  

Load and Sliding Speed Effect on Tribological Properties of CNx Thin Films

作　　者：张瑾[1] 陈向阳[1] 马胜利[2] 

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]西安交通大学材料科学与工程学院,陕西西安710049

出　　处：《材料科学与工程学报》2013年第6期891-895,共5页Journal of Materials Science and Engineering

摘　　要：用反应磁控溅射方法在高速钢基体上制备了CNx薄膜材料,用高分辨透射电镜(HRTEM)研究CNx薄膜的微观结构,用X射线光电子能谱仪(XRD)研究薄膜的元素组成和化学键类型,用显微硬度计检测薄膜的硬度,用划痕仪检测薄膜的结合力,通过改变对磨过程中的载荷和对磨速率用销盘式摩擦磨损试验仪着重研究了载荷和对磨速率对CNx薄膜的摩擦学性能的影响。结果表明:CNx薄膜为非晶结构,由sp2C-C,sp2C-N和sp3C-N化学键组成,TiN过渡层的加入使CNx薄膜的结合力明显提高,CNx薄膜的摩擦系数和磨损率随着载荷和对磨速率的增加呈降低趋势,薄膜在不同对磨条件下均呈现较好的摩擦学性能。CNx thin films were deposited on HSS substrates by reactive magnetron sputtering （RMS）. Microstructure of the CNx thin films was firstly characterized by high-resolution transmission electron microscopy （HRTEM）. The characterization was also extended to chemical composition and chemical bonds by X-ray photoelectron spectrometer （XPS）, micro-hardness by indentation, adhesion by scratch tester. Finally, tribological behavior at different load and sliding speed of the CNx thin films was especially studied using pin- on-disk tribometer. The results indicate that the CNx thin films have an amorphous structure composed by spz C-C, sp2 C-N and sp3 C-N chemical bonds, the adhesion of the CNx thin films improves effectively because of the TiN inter-layer addition, the friction coefficient and volume wear rates decrease as load and sliding speed increase, and the CNx thin films show good tribological properties in various sliding conditions.

关 键 词：CNX薄膜 摩擦学 载荷 对磨速率 

分 类 号：TG174.44[金属学及工艺—金属表面处理]