锗烷合成工艺及用途概述  

The Synthesis Technology And Application of Germane

作　　者：陈艳珊 刘兴斌 

机构地区：[1]佛山市华特气体有限公司,广东佛山528200 [2]大连岩谷气体机具有限公司,辽宁大连116600

出　　处：《低温与特气》2013年第6期33-36,43,共5页Low Temperature and Specialty Gases

摘　　要：锗烷主要用于半导体、光伏太阳能和集成电路行业,是制造高纯锗和各种硅锗合金的重要原材料。主要介绍了锗烷的合成方法:化学还原法、电化学反应法、等离子合成法。同时介绍了锗烷的性质和用途。Germane is used for semiconductor, photovohaic solar energy and integrated circuit industry. It is an important raw material for producing high purity germanium and silicon germanium alloy. This paper mainly introduces the synthesis method of germane： chemical reduction method, electrochemical reaction method, plasma synthesis. The paper also introduced the properties and uses of germane.

关 键 词：锗烷 合成 用途 

分 类 号：TQ264.2[化学工程—有机化工]