高精度曲率半径测量研究  

Research on High-Precision Measurement of Radius of Curvature

作　　者：彭石军[1] 苗二龙[1] 史振广[1] 陈华[1] 隋永新[1] 杨怀江[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2014年第1期101-107,共7页Laser & Optoelectronics Progress

基　　金：国家科技重大专项(2009ZX02205)

摘　　要：由于影响曲率半径测量精度的因素众多,因此高精度曲率半径测量一直是光学检测中的难题之一。为了实现球面光学元件曲率半径的高精度测量,提出通过环境补偿和提高对准精度的方法来减小测量误差。首先从理论的角度分析了影响曲率半径检测精度的主要因素,并给出了在曲率半径测量过程中减小测量误差的方法以及相应的补偿方式。基于此分析,在高精度实验室中采用菲佐干涉仪结合高精度测长干涉仪的干涉测量方式,分别对典型的凸球面和凹球面光学元件进行了曲率半径检测。实验结果表明:通过环境补偿和提高对准精度的方法,曲率半径检测的复现性优于0.2μm,实际测得的相对误差分别为0.67×10^(-6)(2σ)和0.60×10^(-6)(2σ),实现了高精度曲率半径测量。There are many factors that affect the measurement accuracy of the radius of curvature （ROC）. So, high-precision measurement of the ROC has been one of the problems in optical measurement. In order to realize high-precision ROC measurement, a method to reduce the measurement error by environment compensation and improving alignment accuracy is presented. Firstly, the main factors that affect the measurement accuracy of the ROC are analyzed theoretically. And then a method for reducing the measurement errors in the measurement process and the corresponding compensation is proposed. Based on the theoretical analysis, typical convex and concave optical parts are measured respectively by interference method which is composed by a Fizeau interferometer and a high-precision displacement measurement interferometer in high- precision laboratory. Experimental results show that the measurement reproducibility is less than 0.2 um and the relative errors of the measurement are 0.67×10^-6（2σ） and 0.60×10^-6（2σ） respectively through environment compensation and improving alignment accuracy. The high-precision ROC measurement is realized.

关 键 词：测量 曲率半径 轴向对准误差 环境补偿 菲佐干涉仪 

分 类 号：O439[机械工程—光学工程]