基于电子印刷工艺的薄膜热电偶研制  

Research and fabrication of thin film thermocouple based on electronic printing technology

作　　者：杨遂军[1] 邬云晨明 于方舟[1] 叶树亮[1] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018

出　　处：《传感器与微系统》2014年第1期85-88,共4页Transducer and Microsystem Technologies

摘　　要：薄膜热电偶由于具有体积小、热容量小及响应速度快等优点成为近年来学者们研究的重点。薄膜制备常用的方法有射频溅射法、离子镀膜法以及直流脉冲磁控溅射法等,但这些方法操作设备复杂,制作时间长,效率低,成功率低且复现性差。用电子印刷工艺制备薄膜热电偶,将Au,Pt的溶液化微纳米材料印制在基板上,印刷成为Au-Pt薄膜热电偶,该方法操作方便快捷,对电极材料污染小。通过试验证明:采用电子印刷工艺制备的Au-Pt薄膜热电偶符合Au-Pt热电偶检定规程的要求,热电偶精度高,重复性和一致性好。Thin-film thermocouple has many excellent characteristics, such as small size, small heat capacity and fast response speed, in recent years, it becomes the focus of research scholars. Common preparation methods for thin-film thermocouple are RF sputtering, ion plating method and DC pulsed magnetron sputtering method, etc. However, these methods are complex to operate, and production time is long and efficiency is low, success rate is low and reproducibility is poor. Electronic printing technology is used to prepare Au-Pt thin film thermocouple. Solubilized gold and platinum materials is printed onto substrate, and then print it to be Au-Pt thin film thermocouple. This method is convenient, and fast for operation and less pollution. Experiments show that, the Au- Pt thin film thermocouple fabricated by electronic printing technology meets requirements of vertification regulation, precision is high, repeatability and consistency is good.

关 键 词：电子印刷工艺 薄膜热电偶 微纳米材料 Au—Pt热电偶 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]