热致动微型阀膜片的仿真分析及工艺设计  

Simulation Analysis and Process Design of Membrane in Thermally Actuated Micro-valve

作　　者：曹剑[1] 唐建忠[2] 朱笑丛[2] 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009 [2]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《液压与气动》2014年第1期13-17,共5页Chinese Hydraulics & Pneumatics

基　　金：国家自然科学基金资助项目(51005066)

摘　　要：热致动微型阀的主要结构部件为致动膜片。采用硅铝双金属作为膜片材料,设计了一种微型阀的结构,并分析其在温度变化条件下产生挠曲变形的原理。膜片的结构参数与加载温度对其变形量有着重要影响,需要对多个参数进行优化设计。利用ANSYS对膜片进行有限元分析,建立了膜片长度、厚度、宽度及其比例关系、温度对膜片变形的影响曲线,为结构设计提供了理论依据。最后,基于MEMS加工技术,对致动膜片进行了工艺设计。The main component of the thermally actuated micro-valve is the actuated membrane. In this paper, we propose a kind of micro-valve with Si-Al bimetal as the membrane material, and analyze the actuation principle of the membrane. The structural parameters and temperature raise have a great impact on the deformation of the mem-brane. Therefore, we need to make optimized design to each of the parameters. Based on a series of finite element analysis with ANSYS, we reveal the relation between the deformation in the center of the membrane and the param-eters including length, thickness, width and temperature, which can provide a theoretical basis for the structure de-sign of the membrane. Finally, the fabrication process of the membrane based on MEMS technology is presented.

关 键 词：微型阀 双金属 膜片 ANSYS 工艺 

分 类 号：TH138[机械工程—机械制造及自动化]