一种新型的高均匀性非制冷红外读出电路研究  

An Novel Readout Circuit Allowing Microbolometer to Operate with High Uniformity

作　　者：周云[1] 张丽 吕坚[1] 蒋亚东[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054 [2]东北微电子所,辽宁沈阳110032

出　　处：《红外技术》2014年第1期22-25,共4页Infrared Technology

基　　金：国家自然科学基金;编号:61235006

摘　　要：针对非制冷红外探测器系统,设计了一种高均匀性的读出电路(ROIC)结构。由于非制冷红外焦平面阵列中微测辐射热计的制作工艺存在偏差导致探测器输出存在非均匀性,其中列条纹尤为明显。所提出的读出电路能有效地消除列条纹、提高均匀性。该ROIC已在0.5?m CMOS工艺下成功流片,并应用到阵列大小为320×240的非制冷微测辐射热计焦平面上。测试结果表明:固定图像噪声(FPN)仅为0.088V,无明显列条纹。该ROIC在高均匀性的非制冷红外探测器上有着广泛的应用。This paper describes a new read-out IC （ROIC） architecture with high uniformity for the uncooled microbolometer detector. Mismatch which is due to the production process of uncooled infrared focal plane array of microbolometer leads to detector non-uniformly. Especially, the non-uniformity of column is the most obvious. Numerical simulation and measurement of the proposed ROIC architecture demonstrate high readout uniformity. A 320 × 240 uncooled microbolometer focal plane array （FPA） based on the proposed circuit was implemented on silicon using a 0.5 μm CMOS technology. The test spatial fixed pattern noise voltage is 0.088 V. Thus it is ideally suited for high CMOS process.

关 键 词：非制冷 微测辐射热计 非均匀性 读出电路(ROIC) 

分 类 号：TN432[电子电信—微电子学与固体电子学]