板条Nd:YAG晶体的合成盘抛光技术  

Fabrication of Nd:YAG crystal slab using composite lap

作　　者：谢瑞清[1] 廖德锋[1] 王晓博[2] 袁志刚[1] 钟波[1] 陈贤华[1] 王健[1] 雷向阳[1] 侯晶[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]常州西南交通大学轨道交通研究院,江苏常州213100

出　　处：《强激光与粒子束》2014年第1期134-137,共4页High Power Laser and Particle Beams

基　　金：国家科技重大专项课题(2013ZX04006011-101)

摘　　要：针对高功率板条激光器核心工作器件——板条Nd:YAG晶体的超精密加工开展研究,分析了具有特殊构型的板条Nd:YAG晶体元件的加工性能及工艺难点,提出了一种新的基于合成盘抛光的板条Nd:YAG晶体加工工艺,并对规格为100mm×30mm×3mm的板条Nd:YAG晶体进行了加工实验。实验结果表明,合成盘抛光可以很好地控制元件的塌边现象;通过磨料的优化选择,在合成盘抛光工艺中匹配合适粒度的Al2O3磨料能够实现元件的低缺陷加工,元件下盘后的全反射面平面度达0.217λ(1λ=632.8nm),端面平面度达到0.06λ,表面粗糙度达0.55nm(RMS),端面楔角精度可达2″。The present work investigates the fabrication process of precision Nd∶YAG crystal slab which is extensively used in high-power slab lasers.Properties of the crystal and problems during fabrication were analyzed.A novel process based on the composite lap was proposed.Fabrication of a 100 mm× 30 mm× 3 mm sample revealed the validation of this process.Experiment results indicated that the composite lap was superior to conventional lap material for controlling edge collapsing in polishing process.Defect-free surface could be obtained using optimal size and size distribution of Al2 O3 slurry.The surface figure of slab TIRs surface was 0.217λ,while that of the end surface was 0.1λ.The surface roughness approached 0.55 nm RMS.The preci sion of the intersection angle was 2″.

关 键 词：板条激光器 Nd∶YAG晶体 抛光 合成盘 面形 粗糙度 

分 类 号：TQ171.73[化学工程—玻璃工业]