一步闪蒸CIGS薄膜的结构及性能分析  

Structure and characteristics of CIGS thin films prepared by one-step flash-evaporated method

作　　者：李好娜 刘贵山[1] 沈晓月[1] 胡志强[1] 郝洪顺[1] 

机构地区：[1]大连工业大学纺织与材料工程学院,辽宁大连116034

出　　处：《大连工业大学学报》2013年第5期356-358,共3页Journal of Dalian Polytechnic University

基　　金：辽宁省教育厅重点实验室科技项目(2008S017);大连科技平台建设项目(2010-354)

摘　　要：选择铜铟镓硒(CIGS)四元化合物粉末为蒸发源物质,采用闪蒸法在钠钙硅玻璃衬底上沉积CIGS薄膜,重点研究了蒸发功率对CIGS薄膜结构及性能的影响。采用XRD、SEM、UV-vis及四探针测试仪对薄膜进行表征。结果表明,随着蒸发功率的增加,薄膜结晶度变好,颗粒尺寸变大,可见光的吸收系数接近105 cm-1数量级,而CIGS薄膜电阻率及禁带宽度的变化主要来自于薄膜组分的变化。CIGS thin films were deposited on soda lime glass by flash-evaporation using a single quaternary-CIGS powders in stoichiometric proportions.The influences of evaporation power on the structural,optical,and electrical properties of CIGS thin films were investigated.The increase in crystallite size of CIGS was found to be significantly noticeable with increasing evaporation power.The thin films deposited at different evaporation power had high absorption coefficient（105 cm-1）.The changes of resistivity and band-gap attribute to the variations of composition.

关 键 词：闪蒸法 铜铟镓硒(CIGS)薄膜 蒸发功率 

分 类 号：TS254.9[轻工技术与工程—水产品加工及贮藏工程]