粉末溅射SnO_2/CeO_2薄膜气敏元件的性能  

Properties of gas sensitive device of powder-sputtered SnO_2/CeO_2 thin film

作　　者：兰怀迎 曲鲁 刘建同[2] 刘文利[2] 李蕾[2] 

机构地区：[1]济南半导体研究所,山东济南250012 [2]山东大学数理系,山东济南250061

出　　处：《郑州轻工业学院学报》2000年第4期37-39,共3页Journal of Zhengzhou Institute of Light Industry（Natural Science）

摘　　要：通过对粉末溅射SnO2/CeO2薄膜气敏元件性能的测试和探讨，总结出反应升温 Δtrea与气体浓度C存在关系Δtrea=(ACn)/(1+BCm) (其 中A ,B＞0,n＞m＞0)，同时发现:湿度对灵敏度的影响很大而对相对灵敏度影响不大；为确保 测量的可靠性应避免用于测量高浓度气体，同时注意稳定测试电压，如用相对灵敏度进行测 量，则可以减小湿度对测量结果(测量值)Through measuring and study on powder\|sputtered SnO\-2/CeO\-2 thin film gas sen sor, the relationship of the reaction temperature Δtrea incremen t and gas concentration C　is Δtrea=(ACn)/(1+BCm), where A, B＞0, n＞m＞0. It has been found that the humidity has great effect on gas se nsitivity, but has small effect on relative gas sensitivity. To guarantee the re liability of measuring, the high concentration of gas should not be used, and sh ould stabilize the testing voltage. The interference of humidity on measuring re sult can be decreased by testing relative sensitivity.

关 键 词：气敏器件 氧化锡 氧化铈 薄膜 粉末溅射 

分 类 号：TN389[电子电信—物理电子学]