激光偏振干涉纳米定位系统的设计与实验研究  

Design and Experimental Study of Polarimetric Interferometric Nanopositioing System

作　　者：许素安[1] 钱飞[1] 谢敏[1] 黄艳岩[1] 富雅琼[1] 陈乐[1] 孙坚[1] 

机构地区：[1]中国计量学院机电学院,杭州310018

出　　处：《传感技术学报》2013年第12期1671-1675,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51105348);第45批教育部留学回国启动基金项目(2013R10066);浙江省钱江人才计划项目(2013R1066)

摘　　要：为适应工业发展和计量界对精密定位提出的越来越高的要求,提出了基于偏振激光干涉技术的纳米定位方法。在该干涉测长系统中,用偏振计取代传统单频激光干涉仪的光电传感器并配置偏振分光元件、起偏镜等,可将干涉仪出射光的干涉条纹相位细分为36 000份,使用波长为633 nm的激光源,可将理论测量分辨率提高到10 pm。将完成的偏振干涉测长系统与商用SIOS干涉仪的实验测量结果做了比对。对完成的实验系统的各误差源做了实验研究,得到量化值。经不确定度评估计算,在标准实验室环境条件下,对于微米级行程的位移,其位置测量不确定度小于1.4 nm。该方法可应用于纳米定位的各个领域。Aiming at the requirement of higher accuracy of positioning in industry and metrology, a positionning method is proposed based on polarimetric interferometer. In this interferometric system, a polarimeter combined with polarization beamsplitter and polarizer has replaced photo-detector. The fringe interpolation of output laser beam can be reached at 36 000, for a 633 nm laser source, the potential theoretical resolution is 10 pm. The measurements have both carried out by own-developed polarimetric interferometer and commercial SIOS interferometer. The comparison results between this two interferometer show that the polarimetric interferometer is feasible. The experiments have also been done to get the quantified value for each source of errors. Under standard experimental environment, according to uncertainty evaluation, the total uncertainty of measurement is less than 1.4 nm over mi- crometric displacement range. This method can be dedicated to various fields of nano-positioning.

关 键 词：偏振干涉 定位控制 实验研究 误差分析 

分 类 号：TH741[机械工程—光学工程]