基于镜像结构光子晶体的微加速度计设计  

Design of micro accelerometer based on mirror structure photonic crystal

作　　者：汤帅[1] 许丽萍[1] 温廷敦[1] 

机构地区：[1]中北大学微米纳米技术研究中心,山西太原030051

出　　处：《传感器与微系统》2014年第2期70-72,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60776062;50730009)

摘　　要：镜像结构光子晶体能够在一定范围的频带内形成单一的透射峰,受其他频率的光子影响小且易于观察。从理论结果可以看出,这种光子晶体透射率与所受的轴向应力在一定范围内呈简单的线性关系。据此,该设计以典型的单悬臂梁结构为基础设计一种新型加速度计。在单悬臂梁根部所受应力最大处,用镜像结构光子晶体替代以往的力敏电阻器,通过测出透射光强算出透射率,进而可算出加速度的值。从模态分析图中可以看到这种加速度计具有更好的稳定性和抗干扰性。Mirror structure photonic crystal can form single transmission peak,within a certain range of frequency band affected by photons of other frequencies and easy to observe.As can be seen from the theoretical results,this,kind of photonic crystal transmissivity and axial stress has simple linear relationship within a certain range.According to this,the design on the basis of typical single cantilever beam structure,design a new type of accelerometer.In maximum stress position of single cantilever root,use mirror structure photonic crystals instead of force sensitive resistance,calculate transmissivity through measuring transmission light intensity and thus can calculate value of acceleration.It can be seen from modal analysis diagram,this accelerometer has better stability and anti-jamming.

关 键 词：镜像结构光子晶体 微加速度计 介观压光效应 悬臂梁结构 高灵敏度 

分 类 号：O437[机械工程—光学工程]