基于PSD的高精度光电定心仪  

High-precision photoelectric centering instrument based on PSD

作　　者：张欣婷[1,2] 安志勇[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学光电信息学院,吉林长春130012

出　　处：《应用光学》2014年第1期7-10,共4页Journal of Applied Optics

基　　金：国家973重点基础研究发展规划资助项目(2009CB72400603B);中国科学院航空光学成像与测量重点实验室开放课题(Y2HC1SR123)

摘　　要：针对目前定心仪精度不高、并依赖于人眼的现状,提出一种基于PSD的高精度定心仪研究方法.采用自准直光路形式和位置敏感探测器PSD对经过被测目标返回的光斑实行定位,并通过读取计算机上的坐标值来判断是否达到准确的定心.文中对定心仪的光学系统进行设计,并运用神经网络的训练来校正PSD的非线性,在测量范围±2 mm～±500 mm内定心精度达到1μm的设计要求.Against the current situation of centering instrument with low precision and depend ent on the human eyes, a research method of highprecision centering instrument based on po sitionsensitive detector （PSD） was put forward. Through the use of selfcollimated optical path and PSD, the return light spot from the target was located, and the coordinate value on the computer was read to judge whether the accurately centering was achieved. The design of the centering instrument optical system and the nonlinear correction of PSD by neural network training were carried out. Results show that t can accuracy with measuring centering instruments. range of achieve the design requirement of centering mm, which is much better than traditional

关 键 词：光学设计 定心仪 高精度 非线性 

分 类 号：TN202[电子电信—物理电子学]