基于压电效应的MEMS振动式微能源器件  

MEMS Vibration Micro-Power Devices Based on the Piezoelectric Effect

作　　者：陈婷婷[1] 关新锋[2] 杨杰[1] 郭涛[1] 丑修建[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]航天恒星科技有限公司(503所)卫星运营事业部,北京100086

出　　处：《微纳电子技术》2014年第2期110-114,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51075374)

摘　　要：设计了一种硅基压电功能材料的四悬臂梁-中心质量块结构MEMS振动式微能源器件,可将环境振动能量有效转化为电能。采用溶胶-凝胶法制备硅基锆钛酸铅(PbZr0.53Ti0.47O3,PZT)压电功能薄膜,经干/湿法刻蚀和溅射沉积等MEMS工艺实现器件功能结构的制备。研制的器件整体结构尺寸为7 000μm×7 000μm×300μm,单个PZT压电单元面积为0.149 6 mm2。将悬臂梁上4个压电单元串联以实现输出最大化,测试结果表明,器件的谐振频率为300 Hz,适于低频振动环境;输出电压在一定范围内随加速度增加而增大;在加速度为10 g时压电单元单位面积输出电压达1.19 mV/mm2。Abstract： A MEMS vibration micro-power device of the four cantilever beams and center quality block structure based on the piezoelectric effect of functional materials on the silicon substrate was designed to transform the environment vibration into the electric energy. The PbZr0.533Ti0.47O3 （PZT） piezoelectric functional thin film was fabricated by the sol-gel method, and the fabrication of the functional structure for the device was realized by the micro-electromechanical system （MEMS） technologies such as the wet/dry etching and sputtering deposition, et al. The overall structure size of the de- vice is 7 000 μm x 7 000 μm X 300 μm, and the area of the single PZT piezoelectric cell is 0. 149 6 mm2. The output maximization was realized by using series connection of the four piezo- electric cells on the cantilever beams. The testing results show that the device meets the low fre- quency vibration condition at the resonant frequency of 300 Hz; the output voltage increases with the increase of the acceleration within a certain range, and the output voltage per unit area of a piezoelectric cell is 1.19 mV/mm2 under the acceleration of 10 g.

关 键 词：微机电系统(MEMS) 振动 压电转换 微能源 输出电压 

分 类 号：TM919[电气工程—电力电子与电力传动] TH703[机械工程—仪器科学与技术]