一种基于高速柔性薄膜电子的CMOS温度传感器  

A CMOS Temperature Sensor Based on High-speed Flexible Thin Film Electronics

作　　者：夏怡[1] 张晓林[1] 申晶[1] 

机构地区：[1]北京航空航天大学,北京100191

出　　处：《遥测遥控》2014年第1期65-68,72,共5页Journal of Telemetry,Tracking and Command

摘　　要：设计一种基于高速柔性薄膜电子的温度传感器,指出未来柔性薄膜电子研究的趋势和重点.选取柔性薄膜铂电阻作为前端敏感元件,设计实现了一种与之相匹配的后端转换集成电路.基于SMIC 0.18μm CMOS工艺库的仿真结果表明,转换电路增益39.8dB,共模抑制比大于85dB;温度传感器能够完成测温的功能且线性度良好,可测量-50℃ ～ 90℃范围内的温度,灵敏度4.8mV/℃,精度0.12％,在1.8V电源电压下,功耗仅为2.04mw.A temperature sensor is designed based on the high-speed flexible thin film electronics in this paper. And the future trends and research of electronic flexible thin film are also pointed out . With the flexible thin-film platinum resistance selected as the sensing element, an integrated conversion circuit is designed to match the front-end. Implemented in a SMIC 0. 18m CMOS process, the simulation results show that the conversion circuit provides a gain of 39.8dB with the common mode rejection ratio greater than 85dB. The temperature sensor measures the temperature ranging from - 50℃ to 90℃ with good linearity, a sensitivity of 4.8mVPC , an accuracy of 0.12% and power consumption of only 2.04mW in 1.8V supply.

关 键 词：高速柔性薄膜电子 薄膜铂电阻 温度检测 仪表放大器 

分 类 号：TN432[电子电信—微电子学与固体电子学]