FBAR技术的敏感应用与发展研究  

Study on Applications and Developments of FBAR Sensors

作　　者：何杰[1] 袁小平[1] 刘荣贵[1] 许昕[1] 李昕[1] 袁媛[1] 毛海燕[1] 马晋毅[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2014年第1期19-26,31,共9页Piezoelectrics & Acoustooptics

摘　　要：薄膜声体波谐振器(FBAR)技术以其频率高,品质因数(Q)高,插入损耗低,与半导体集成电路(IC)工艺兼容等优良特性在无线通信领域获得了广泛应用。基于FBAR技术的传感器具有灵敏度高,体积小,线性度好及易于集成等特点,符合目前传感器的微型化、智能化、信息化的主流发展趋势。该文对FBAR传感器的研究现状、发展动向等方面进行了总结并对石英晶体微天平(QCM)、声表面波(SAW)和FBAR这几种声波质量传感器进行了比较。最后对FBAR传感器技术作了简要评述并讨论了FBAR传感器未来的发展趋势。The thin film bulk acoustic resonator（FBAR） technology has been applied widely to the wireless communications because of its high resonant frequency,high Q,low insertion loss and compatibility with IC process.The FBAR-based sensors have the excellent features of high sensitivity,small size,good linearity,and easy-to-integrate,conforming to the main-stream development trends of miniaturization,intelligentization and informatization in sensor＇s realms.The current status and developments of FBAR sensors have been reviewed,and comparisons among QCM,SAW and FBAR sensors have been carried out in this paper.The FBAR sensor technology has been commented briefly,and the future trends of FBAR sensors have also been discussed.

关 键 词：薄膜声体波谐振器(FBAR) FBAR质量传感器 FBAR物理传感器 声波质量传感器 

分 类 号：TM215.3[一般工业技术—材料科学与工程] TN65[电气工程—电工理论与新技术]