基于SAW器件的狭缝间作用力监测传感器  

SAW Sensor for Monitoring Load in Slit

作　　者：李海宁[1] 丁杰雄[1] 姜忠[1] 付陆元[1] 刘广民[2] 

机构地区：[1]电子科技大学机械电子工程学院,四川成都611731 [2]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《仪表技术与传感器》2014年第1期7-10,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(11076007)

摘　　要：为了测量由两曲面组成的狭缝间的作用力,研究设计了一种基于单端声表面波(Surface Acoustic Wave,SAW)谐振器的接触应力传感器并研究了其制作工艺。首先,围绕曲面狭缝环境,讨论了作用力测量的传感技术方案,并针对不同的力敏结构在COMSOL Multiphysics软件下进行了应力仿真,进而确定了声表面波谐振器和支撑基底的尺寸参数;其次,结合MEMS工艺对单端SAW谐振器的制作工艺进行了研究,并针对狭缝环境提出一种新型SAW器件封装方式。通过对声表面波传感器设计与制作过程的探究,验证了利用声表面波进行狭缝空间应力测量的可行性。In order to measure the pressure in curved slit,a contact stress sensor based on one-port surface acoustic wave resonators was proposed and the manufacture was studied.Firstly,the sensing scheme about curved slit stress measuring was discussed.The stress simulations in COMSOL Multiphysics with different force-sensitive structures were presented.The detailed sizes of SAW resonator and supporting bases were suggested.Secondly,combining with MEMS process manufacturing the SAWR resonator was discussed and a novel packaged type of SAWR in curved slit was proposed.By exploring the design and process of SAW stress sensor,the results shows that it is feasible to measure pressure in slit based on SAW.

关 键 词：声表面波谐振器 曲面狭缝 应力仿真 MEMS工艺 封装方式 

分 类 号：TN65[电子电信—电路与系统]