纳米压印工艺制作DFB激光器的可靠性研究  

Reliability Study of DFB Laser Fabricated by Nanoimprint Technology

作　　者：赵建宜[1] 陈鑫[1] 周宁 曹明德 黄晓东 刘文[1,3] 

机构地区：[1]华中科技大学光学与电子信息学院光电国家实验室,湖北武汉430074 [2]光迅科技股份有限公司,湖北武汉430074 [3]中国科学技术大学先进技术研究院,安徽合肥230026

出　　处：《光学学报》2014年第2期48-54,共7页Acta Optica Sinica

基　　金：国家973计划(2010CB327603);国家863计划(2011AA010304);武汉市科技晨光计划(2013070104010033)

摘　　要：利用光荧光谱及X射线双晶衍射研究了纳米压印工艺对半导体外延材料的影响。利用纳米压印工艺制作了1.55μm通信用分布反馈(DFB)半导体激光器,并对制作的器件进行了老化寿命试验。实验结果表明,采用软模版压印并不会劣化半导体外延材料的特性。制作的半导体激光器预期寿命与普通双光束曝光法制得的器件预期相当,表明纳米压印工艺制作半导体激光器是可靠的。Abstract The influence of nanoimprint technology on the epitaxial materials is analyzed with the use of photoluminescence and X-ray diffraction. 1. 55μm distributed feedback （DFB） laser diodes for optical fiber communication are fabricated using nanoimprint technology, and then accelerating life test is applied to these devices. Results show that soft stamp nanoimprint will not lead to a serious degradation of the epitaxial materials. The lifetimes of the lasers fabricated by nanoimprint and exposure method are on the same order of magnitude, indicating that nanoimprint technology is safe and reliable to the fabrication of lasers.

关 键 词：集成光学 纳米压印 半导体激光器 单片光子集成电路 

分 类 号：TN248[电子电信—物理电子学]