低温磁控溅射制备CdS薄膜的结构和光学特性(英文)  

Structural and optical properties of CdS thin films prepared by RF sputtering

作　　者：朱燕艳[1] 徐闰[2] 方泽波[3] 

机构地区：[1]上海电力学院数理学院,上海200090 [2]上海大学材料系,上海200072 [3]绍兴文理学院物理系,浙江绍兴312000

出　　处：《红外与毫米波学报》2014年第1期40-44,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Natural Science Foundation of China under grant No.11004130(The physical properties of erbium oxide selective emitters and antireflection coatings);Shanghai Educational Commission under Grant No.12zz175(Study on the physical properties of selective emitters of rare earth oxides)

摘　　要：用磁控溅射的方法在透明导电氧化物衬底上制备了CdS薄膜,制备时的衬底温度为30 ～ 200℃.X射线衍射测试结果表明在这一条件下制备的CdS薄膜是六角纤锌矿的多晶结构.扫描电子显微镜结果显示薄膜具有较好的晶体质量,这一结论也和拉曼光谱、紫外-可见吸收光谱、光致发光光谱的结果一致.拉曼光谱显示CdS薄膜内部的压应力随着制备温度的提高而增大.Cadmium sulfide thin films were grown on transparent conductive oxide coated glass substrates by radio frequency magnetron sputtering with a substrate temperature ranging from 30 ℃ to 200 ℃. X-ray diffraction measurements reveal that cadmium sulfide films were polycrystalline with the hexagonal wurtzite structure. The scanning electron microscope images show a good crystalline quality of the films which can also be confirmed by the Raman spectra, ultraviolet-visible absorption spectra and the photoluminescence spectroscopy. The Raman spectra measurements indicate that the compressive stress in the CdS films increases with increasing growth temoerature.

关 键 词：磁控溅射 太阳能电池 

分 类 号：P578.2[天文地球—矿物学] TN305.92[天文地球—地质学]