溶胶-凝胶法制备薄膜时溶剂的选择  

Choice of solvent in process of preparing Ba_(0.8)Sr_(0.2)TiO_3 thin films by sol-gel method

作　　者：饶伟[1,2] 李定国[1] 王耘波[2] 王叶安[2] 于军[2] 

机构地区：[1]海军工程大学理学院,武汉430033 [2]华中科技大学光电子科学与技术学院,武汉430074

出　　处：《海军工程大学学报》2014年第1期13-16,22,共5页Journal of Naval University of Engineering

基　　金：国家自然科学基金资助项目(60971008)

摘　　要：以异丙醇、乙二醇、乙二醇甲醚和乙二醇乙醚4种有机物作为溶剂，采用溶胶-凝胶工艺在Si衬底上制备了钛酸锶钡（BST ）薄膜。利用分光光度计、XRD、SEM等手段对不同溶剂溶胶的透光率和BST薄膜的结构、形貌进行了表征，从溶胶-凝胶转变速度和制备的薄膜结晶质量等方面研究了溶剂对溶胶-凝胶法制备薄膜的影响。研究结果表明：用乙二醇乙醚为溶剂，经过1～3 d陈化后，BS T 薄膜质量较好；在溶胶-凝胶法制备薄膜中，选用黏度小、沸点高、蒸发热大的溶剂有利于形成致密度较高的薄膜。The barium strontium titanate （BST ） thin films were prepared on Si substrates by sol-gel process with four kinds of organic solvents-isopropyl alcohol ,ethylene glycol ,ethylene glycol mono-methyl ether and ethylene glycol ether .The transmittance of sol-gel with different solvents and the structure and morphology of BTS films were characterized by means of spectrophotometer ,XRD and SEM .The sol-gel transition speed and the thin-film crystalline quality were analyzed .The results show that after ethylene glycol ether is laid for one to three days ,the quality of BST thin films is bet-ter .The choice of solvent with little viscosity ,high boiling point and large heat-evaporated capacity is beneficial to the formation of thin films with high compactness in the sol-gel process .

关 键 词：BST薄膜 溶胶-凝胶法 溶剂 

分 类 号：O648.16[理学—物理化学]