抗反射疏水红外窗口的制备研究  

Research on the fabrication and property of hydrophobic antireflective infrared window

作　　者：张然[1] 曹小文[2] 徐微微 Haraguchi Masanobu 高炳荣[1] 

机构地区：[1]吉林大学电子科学与工程学院,集成光电子学国家重点联合实验室,长春130012 [2]吉林大学机械科学与工程学院,长春130022 [3]Department of Optical Science and Technology, University of Tokushima, 7708506, Japan

出　　处：《物理学报》2014年第5期143-148,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:21003060)资助的课题~~

摘　　要：本研究利用纳秒激光两次双光束干涉无掩模烧蚀、快速制备硫化锌(ZnS)微纳结构抗反射疏水表面,使其红外透过率由原来的75%增加到92%,解决了表面淀积抗反射镀层膜层附着力、抗蚀性、热胀失配等问题.此方法加工过程快速简单,可实现大面积制作,且微纳结构使基底具有疏水性能,疏水角可达145fi.使其在光电子、太阳能、航空航天及红外制导等领域具有广泛的应用前景.We proposed a facile approach for rapid and maskless production of zinc sulfide microstructure used as antirefiective and hydrophobic surface by direct laser interference ablation. This surface could improve the infrared transmittance from 75% to 92%; and the problem of bad film adhesion, corrosion resistance, and the thermal expansion mismatch in the antirefiective coating membrane were solved. By this method a quick and simple fabrication, and a large-area production as well as the hydrophobic properties with a contact angle of 145fican be realized. Hence this approach can have future broad applications in areas of optoelectronics, solar energy, aerospace, and infrared guidance etc.

关 键 词：激光干涉 抗反射 疏水 

分 类 号：TN24[电子电信—物理电子学]