ZJ5410型宽量程复合真空计的研制  

Development of ZJ5410 wide-range compsite vacuum gauge

作　　者：李树智 侯世儒 刘舒 

机构地区：[1]辽宁省计量科学研究院,辽宁沈阳110004 [2]沈阳恒进真空科技有限公司,辽宁沈阳10168

出　　处：《真空》2014年第2期60-65,共6页Vacuum

摘　　要：ZJ5410型复合真空计可进行105 Pa^10-1 Pa宽量程测试。为ZJ-54D热偶规管研制了配套的扩流恒流源,同时又为ZJ-10电离规管研制了由SM89C52单片机和开关电源模块TOPSwitch相结合的配套电源,本电源是一款新型宽量程复合真空计电源。本计充分发挥了单片机实时性好,容易扩展,运算速度快等功能,实现了热偶计压力值拟合曲线浮点运算,液晶屏多数据信息同时显示,真空度动态显示,真空度长时间记录和曲线显示等功能。ZJ5410 compsite vacuum gauge can complete wide-range test from 105 Pa to 10-1 Pa.The extendable constant current source was developed for the ZJ-54D thermocouple gauge,and the surpporting power supply combined SM89C52 microcontroller with switching power supply module TOPSwitch was developed for ZJ-10 ionization gauge,which is a new power supply for wide-range composite vacuum gauge.This gauge gives full play to the real-time performance,easy to extend,computing speed of microcontroller, and realizes the thermocouple gauge pressure fitting curve floating point arithmetic,simultaneous display of multi-datas on LCD panel, dynamic display and long time record of vacuum degree,curve display and other functions.

关 键 词：真空计 热偶规管 电离规管 电源 单片机 开关电源模块 

分 类 号：TB772.4[一般工业技术—真空技术]