材料在真空环境下放气的测试技术研究  

MEASUREMENT STUDY FOR VACUUM MATERIALS OUTGASSING

作　　者：董猛[1] 冯焱[1] 成永军[1] 盛学民[1] 赵澜[1] 王永军[1] 

机构地区：[1]兰州空间技术物理研究所国防科技工业真空一级计量站,甘肃兰州730000

出　　处：《真空与低温》2014年第1期46-51,共6页Vacuum and Cryogenics

摘　　要：在真空材料放气率测试装置上对金属材料的放气特性进行了实验研究,实验采用的方法为静态升压法、固定流导法、双通道气路转换法。实验结果表明,测试装置的极限真空度为9.2×10-9Pa,铜、铝合金2A12、304不锈钢三种材料半小时后的放气率分别为2.34×10-8Pa·m3·s-1·cm-2、1.83×10-9Pa·m3·s-1·cm-2、8.48×10-11Pa·m3·s-1·cm-2。利用四极质谱计测得装置的本底气体成分主要有H2、N2/CO、H2O和CO2,材料放出的气体成分主要有N2/CO、H2O。三种方法测试得到的铜金属材料的放气率随着温度的升高而不断增大。The experiment for metal materials outgassing rates property was performed on the vacuum material outgassing rate apparatus. The constant volume method, the orifice throughput method and switching between two pumping paths （ SPP ） method were adopted for the experiment study. The results show that the ultimate pressure of apparatus is 9.2×10^-9PaPa. After half hour, the outgassing rate of copper, alliunl alloy and 304 stainless steel is 2.34×10^-8a·m^3·s^-1·cm^-2、1.83×10^-9Pa·m^3·s^-1·cm^-2、8.48×10^-11Pa·m^3·s^-1·cm^-2, respectively. The background gas species of apparatus by quadruple mass-spectrometer are H2, N2/CO, H2O and CO2. The materials outgassing species are mainly N2/CO and H2O. Additionally, the copper outgassing rate measured by three methods increases with elevated temperature.

关 键 词：材料放气率 双通道气路转换法 固定流导法 静态升压法 

分 类 号：TB771[一般工业技术—真空技术]