激光干涉微纳双重结构调制周期的提取  

The Extraction of Characteristic Parameters of Micro-nano Dual Structure Made by Laser Interference

作　　者：连凡凡 胡贞[1] 

机构地区：[1]长春理工大学电子信息工程学院,长春130022

出　　处：《长春理工大学学报（自然科学版）》2014年第1期65-67,71,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

摘　　要：为了制备质量更高的微纳双重结构,采用激光干涉光刻技术,分别搭建三光束、四光束和六光束光路进行光干涉,对干涉结果进行图像采集的实验。采用图像处理的方法对采集的图像进行处理,提取了微纳双重结构的调制周期,并与理论周期值进行比较,验证方法的可行性,为后续提取微纳双重结构的其它特征参数奠定了基础。Set up three beams light path,four beams light path and six beams light path respectively by using the laser interference lithography, conduct the optical interference and obtain the result of image acquisition experiment. Make a image processing for the acquired image by Matlab, extract the micro-nano dual structure modulation cycle, compare with theoretical calculation cycle value, and verify feasibility of the program. The measurement of modulation cycle lay a foundation for subsequent extraction of micro-nano other characteristic parameters of the dual structure.

关 键 词：微纳双重结构 激光干涉光刻 图像采集 调制周期 

分 类 号：TN911.4[电子电信—通信与信息系统]