Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究  

Effects of Ba Ratio on Properties of YBCO Film Prepared by MOCVD

作　　者：刘鑫[1] 熊杰[1] 张飞[1] 赵晓辉[1] 赵睿鹏 陶伯万[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《无机材料学报》2014年第3期275-278,共4页Journal of Inorganic Materials

基　　金：中央高校业务经费(ZYGX2011Z002;ZYGX2012J039);四川省青年科技创新研究团队(2011JTD0006;2011JTD0002);国家自然科学基金(51002024)~~

摘　　要：采用单一液相混合源进液及闪蒸的MOCVD系统在LaAlO3(001)单晶基片上制备YBa2Cu3O7-x(YBCO)薄膜,研究混合源中Ba含量对YBCO超导薄膜成分、结构及电流承载能力的影响。结果表明,当Ba含量较小时,YBCO薄膜中易于形成尺寸较小的CuO颗粒;随着Ba含量的增加,薄膜中形成Ba2CuO3晶粒,并且Ba2CuO3晶粒尺寸随Ba含量的增加而逐渐增大。杂质相的含量、尺寸以及与YBCO的晶格匹配程度对YBCO薄膜的双轴取向生长和电流承载能力具有重要影响。当原料摩尔配比Ba/Y=3.9时,成功制备出了具有优异面内面外取向、结构致密的YBCO超导薄膜,77 K下的300 nm厚度薄膜的临界电流密度达到4.0 MA/cm2,该研究结果对于第二代涂层导体的发展具有重要意义。YBa2Cu3O7-x（YBCO） films were deposited on single crystal LaAlO3（001） substrates by MOCVD with the single source system and flash evaporation mode. The effects of Barium content on the composition, microstructure and current carrying capacity of YBCO superconducting films were systematically investigated. The results demonstrated that CuO grains were inclined to form in YBCO films with lower Ba content. As Ba content increasing, Ba2CuO3 grains began to form and the size of the grain kept increased. The amount and size of the second phase and its lattice match with YBCO played important roles in biaxial epitaxial growth and current carrying capability of YBCO films. When the mole ratio of Ba/Y is 3.9 in precursor, the 300 nm-thickness YBCO superconducting film with good in-plane and out-of-plane texture have been successfully fabricated, showing the critical current density （Jc at self-field, 77 K） of 4.0 MA/cm^2 measured by induction method.

关 键 词：MOCVD YBCO 高温超导 临界电流密度 

分 类 号：TQ26[化学工程—有机化工]